Vu Van H, Nguyen TD, Duong Thi Thanh H, Trương Thị Thanh Tâm, Giáp Thị Thùy. Lower driving voltage for V-shaped Electrothermal Microactuator based on the surface sputtering process. J. Mil. Sci. Technol. [Internet]. 2023 Dec. 25 [cited 2026 Mar. 12];92(92):21-9. Available from: https://jmst.mod.gov.vn/index.php/jmst/article/view/838