Electron transport coefficients in tries-SiH4 mixture
Keywords:
Electron transport coefficients, Boltzmann equation, PECVD, TRIES, SiH4Abstract
The electron transport coefficients for the TRIES-SiH4 mixtures in the E/N (the reduced electric field) range of 0.1-1000 Td (townsend) were calculated for the first time by solving the two-term approximation of Boltzmann equation. The calculation based on the reliable sets of electron collision cross section for the TRIES and SiH4 molecules. The present results are important data for modelling and simulation of plasma discharge using TRIES/SiH4 mixtures.
References
G. Franz, "Plasma Enhanced Chemical Vapor Deposition of Organic Polymers," Processes, Vol. 9, no. 6, pp. 980, (2021).
J. H. Lee, C. H. Jeong, J. T. Lim, N. G. Jo, S. J. Kyung and G. Y. Yeom, "Characteristic of SiO2 Films Deposited by Using Low-Temperature PECVD with TEOS/N2/O2," Journal of the Korean Physical Society, Vol. 46, pp. 890-894, (2005).
Y. Kudoh, Y. Homma, N. Sakuma, T. Furusawa and K. Kusukawa, "Directional Plasma CVD Technology for Sub-quarter-micron Feature Size Multilevel Interconnections," Japanese journal of applied physics, Vol. 37, pp. 1145-1149, (1998).
P.T. Tuoi, D. A. Tuan, P.X. Hien "Electron Collision Cross Sections for the TRIES Molecule and Electron Transport Coefficients in TRIES-Ar and TRIES-O2 Mixtures" Journal of the Korean Physical Society, Vol. 73, No. 12, pp. 1855-1862, (2018).
M. Kurachi and Y. Nakamura, "Electron collision cross sections for the monosilane molecule," Journal of Physics D: Applied Physics 22, pp. 107, (1989).
H. Tagashira, Y. Sakai, and S. Sakamoto, "The development of electron avalanches in argon at high E/N values. II. Boltzmann equation analysis" J. Phys. D. 10, pp. 1051-1063, (1977).
P. X. Hien, P. T. Tuoi, T. C. Nhung, D. A. Tuan, "Studying Effect of Adding Buffer Gases Studying Effect of Adding Buffer Gases Transport Coefficients", Lecture Notes in Networks and Systems, Vol. 104, pp. 693-703, (2020).
P.X. Hien, D. A. Tuan, B.H. Jeon, "Electron collision cross sections for the BF3 molecule and electron transport coefficients in BF3–Ar and BF3–SiH4 mixtures," Journal of the Physical Society of Japan 82, pp. 034301-034308, (2013).
